MEMSピンセットの駆動
(1) プローブの動き（Sin波20Vpp）
(The movie was taken by L.Jalabert LIMMS/CNRS-IIS)
(2) アクチュエータとセンサ部分の動き（Sin波20Vpp）
(The movie was taken by L.Jalabert LIMMS/CNRS-IIS)
MEMS-based biomedical engineering
MEMS-based biomedical engineering
MEMSピンセットの駆動
(1) プローブの動き（Sin波20Vpp）
(The movie was taken by L.Jalabert LIMMS/CNRS-IIS)
(2) アクチュエータとセンサ部分の動き（Sin波20Vpp）
(The movie was taken by L.Jalabert LIMMS/CNRS-IIS)