{"id":1415,"date":"2026-04-21T16:32:15","date_gmt":"2026-04-21T07:32:15","guid":{"rendered":"https:\/\/www.life.kyutech.ac.jp\/~mems\/?page_id=1415"},"modified":"2026-05-18T13:28:01","modified_gmt":"2026-05-18T04:28:01","slug":"conf-int","status":"publish","type":"page","link":"https:\/\/www.life.kyutech.ac.jp\/~mems\/conf-int\/","title":{"rendered":"International Conferences"},"content":{"rendered":"\n
2025<\/h6>\n\n\n\n
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  1. F. A. Dinata, M. S. Al Farisi<\/strong>, N. K. Putra: \"Designing In Situ Pressure Measurement System for In Vitro Vascular Model Experiment,\" In 2025 22nd Int. Conf. Flow Dynamics (ICFD)<\/em>, p. OS9-11 (2025).<\/li>\n\n\n\n
  2. M. H. B. Junaidi, M. B. Mazalan, A. M. Noor, M. F. Ahmad, M. S. Al Farisi<\/strong>, T.-D. Do, W. S. W. K. Zaman, Y. Wahab, A. A. Manaf: \"Reduced Graphene Oxide-Based Gas Sensor Using Surface Acoustic Wave Devices,\" In 2025 IEEE Int. Conf. Sensors and Nanotechnology (SENNANO)<\/em>, p. 1571186214 (2025)<\/a>.<\/li>\n\n\n\n
  3. F. A. Dinata, H. F. Anshori, M. S. Al Farisi<\/strong>, M. Iqbal, N. K. Putra: \"On-Site Fluid Pressure Measurement Device for Vascular Flow Evaluation,\" In 2025 9th Int. Conf. Instrumentation, Control, and Automation (ICA)<\/em>, p. 1571163995 (2025)<\/a>.<\/li>\n\n\n\n
  4. M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Nano\/Microsystems for Medical Assessment Inside Lung Airway,\" In 2025 2nd Int. Sem. Nanotechnology, Nanomaterials and Devices (ISNND)<\/em>, p. 23 (2025). (Invited<\/mark><\/strong>)<\/li>\n\n\n\n
  5. M. S. Al Farisi<\/strong>, T. Tsukada, Y. Hasegawa, M. Matsushima, S. Hasegawa, T. Kawabe, M. Shikida: \"Palm-sized wireless MEMS flow sensor system attachable to medical mask for real-time respiration monitoring,\" In 2025 23rd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 582\u2013585 (2025)<\/a>.<\/li>\n\n\n\n
  6. M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Shikida: \"Over 90% reduction of response time in flexible MEMS thermal sensor using localized backside laser ablation,\" In 2025 23rd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 1125\u20131128 (2025)<\/a>.<\/li>\n\n\n\n
  7. R. Nakamura, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Biodegradable transient airflow sensor toward eco-friendly implant for respiration monitoring,\" In 2025 23rd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 1149\u20131152 (2025)<\/a>.<\/li>\n\n\n\n
  8. J. Yoshida, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Balloon catheter with integrated airflow sensor for respiration measurement inside lung airway,\" In 2025 23rd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 1941\u20131944 (2025)<\/a>.<\/li>\n\n\n\n
  9. A. Hirayama, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Hollow microcatheter actuator and MEMS thermal flow sensor hybridization toward respiration measurement inside 1 mm diameter bronchioles in lung airway,\" In 2025 23rd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 1976\u20131979 (2025)<\/a>.<\/li>\n\n\n\n
  10. A. Sueyoshi, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Shikida: \"Facile laser fabrication of flexible free-standing thermal sensor for wall shear stress detection,\" In 2025 23rd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 2071\u20132074 (2025)<\/a>.<\/li>\n\n\n\n
  11. M. N. Mohamed Zukri, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Shikida: \"Laser micromachined 3D-shaped free-standing structures on flexible substrate for thermal flow sensor,\" In 2025 23rd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 2125\u20132128 (2025)<\/a>.<\/li>\n<\/ol>\n\n\n\n
    2024<\/h6>\n\n\n\n
      \n
    1. M. N. Mohamed Zukri, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Shikida: \"Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor,\" In 2024 IEEE Sensors<\/em>, p. 6273 (2024)<\/a>.<\/li>\n\n\n\n
    2. M. S. Al Farisi<\/strong>, Y. Wang, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement,\" In 2024 IEEE Sensors<\/em>, p. 7212 (2024). (Pre-published journal paper<\/a>)<\/li>\n\n\n\n
    3. M. B. Mazalan, A. M. Noor, Y. Wahab, W. S. W. Kamarul Zaman; M. S. Al Farisi<\/strong>, A. H. Ab Rashid, D. T. Dung: \"Numerical characterization and optimization of the surface acoustic waves (SAW) device for cell therapy Available to Purchase,\" In 5th Int. Conf. Math. Eng. Indus. Appl. (ICoMEIA 2024)<\/em>, AIP Conf. Proc. <\/em>3462 p. 050002 (2024)<\/a>.<\/li>\n\n\n\n
    4. A. Sueyoshi, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Slip Joint Adaptor Enabling Respiration Airflow Measurement in Tracheal Intubation Tube,\" In 11th Asia-Pacific Conf. Transducers Micro-Nano Technol. (APCOT 2024)<\/em>, pp. 272\u2013273 (2024).<\/li>\n\n\n\n
    5. A. Miyawaki, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Safety Enhancement Consideration of Pitot Tube Sensor Probe Towards Airflow Measurement of Exhalation Inside Pulmonary Airway,\" In 11th Asia-Pacific Conf. Transducers Micro-Nano Technol. (APCOT 2024)<\/em>, pp. 274\u2013275 (2024).<\/li>\n\n\n\n
    6. Y. Yoshimura, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Hybrid Integration of Airflow Sensor and CO2 Sensor for Respiration Measurement,\" In 11th Asia-Pacific Conf. Transducers Micro-Nano Technol. (APCOT 2024)<\/em>, pp. 375\u2013376 (2024).<\/li>\n\n\n\n
    7. M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Flexible MEMS Thermal Sensor Using Cost-Effective Metallization: Al,\" In 11th Asia-Pacific Conf. Transducers Micro-Nano Technol. (APCOT 2024)<\/em>, pp. 377\u2013378 (2024).<\/li>\n\n\n\n
    8. K. Horie, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Investigation on Calibration Methodology for Wearable Piezoelectric Sensor Thread Using Airflow Sensor for Quantitative Respiration Measurement,\" In 11th Asia-Pacific Conf. Transducers Micro-Nano Technol. (APCOT 2024)<\/em>, pp. 438\u2013439 (2024).<\/li>\n\n\n\n
    9. R. Nagayama, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Integrating Flexible Airflow Sensor into Tracheal Intubation Tube for Respiration Monitoring During Canine Tartar Removal,\" In 11th Asia-Pacific Conf. Transducers Micro-Nano Technol. (APCOT 2024)<\/em>, pp. 448\u2013449 (2024).<\/li>\n\n\n\n
    10. M. S. Al Farisi<\/strong>, Y. Wang, Y. Hasegawa, M. Shikida: \"Facile Packaging for Fiber-Shaped Flexible MEMS Thermal Accelerometer,\" In 11th IEEE Int. Symp. on Inertial Sensors & Systems (INERTIAL)<\/em>, p. A3L-A-3 (2024).<\/li>\n<\/ol>\n\n\n\n
      2023<\/h6>\n\n\n\n
        \n
      1. N. K. Putra, F. A. Dinata, M. Iqbal, M. S. Al Farisi<\/strong>: \"Trials on MEMS sensor utilization on 3D printed intravascular flow model,\" In 12th Asian-Pacific Conference on Biomechanics (AP-Biomech)<\/em>, p. 112 (2023).<\/li>\n\n\n\n
      2. M. S. Al Farisi<\/strong>, S. Toyota, Y. Hasegawa, M. Shikida: \"Laser Processing for Time Response Enhancement of Flexible MEMS Thermal Sensors,\" In 36th Int. Microprocesses and Nanotechnology Conf. (MNC)<\/em>, p. 17D-1-4 (2023).<\/li>\n\n\n\n
      3. S. H. Lee, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Embedding Airflow Sensing Function in Balloon Catheter for Respiration Measurement in Bronchus Region Inside Lung,\" In 36th Int. Microprocesses and Nanotechnology Conf. (MNC)<\/em>, p. 17D-1-5 (2023).<\/li>\n\n\n\n
      4. R. Nagayama, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Tracheal Intubation Tube with Embedded Flow Sensor for Respiration and Heartbeat Monitoring During Canine Tartar Removal,\" In 36th Int. Microprocesses and Nanotechnology Conf. (MNC)<\/em>, p. 17P-1-61 (2023).<\/li>\n\n\n\n
      5. F. A. Dinata, M. S. Al Farisi<\/strong>, M. Iqbal, N. K. Putra: \"Development of a Flow Simulator for Evaluation of Hemodynamics Computational Simulation,\" In 2023 8th Int. Conf. Instrumentation, Control, and Automation (ICA)<\/em>, pp. 213\u2013217 (2023)<\/a>.<\/li>\n\n\n\n
      6. M. S. Al Farisi<\/strong>, Y. Wang, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"In-tube-center packaging of flexible MEMS airflow-rate sensor and its sensitivity enhancement,\" In 2023 22nd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 800\u2013803 (2023)<\/a>.<\/li>\n\n\n\n
      7. K. Horie, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Calibration method for wearable sensor using airflow at mouth for quantitative monitoring of respiration and heartbeat,\" In 2023 22nd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 1872\u20131875 (2023)<\/a>.<\/li>\n\n\n\n
      8. A. Miyawaki, M. S. Al Farisi<\/strong>, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Simultaneous airflow and pressure measurements based on pitot tube for evaluation of expired air inside lung airway,\" In 2023 22nd Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 1888\u20131891 (2023)<\/a>.<\/li>\n<\/ol>\n\n\n\n
        2022<\/h6>\n\n\n\n
          \n
        1. T. Tsukada, Y. Hasegawa, M. S. Al Farisi<\/strong>, S. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida: \"Wireless MEMS Thermal Flow Sensor System Integrated On Medical Mask For Emergency Medical Treatment,\" In 10th Asia-Pacific Conf. Transducers Micro-Nano Technol. (APCOT 2022)<\/em>, p. A0110 (2022).<\/li>\n<\/ol>\n\n\n\n
          2021<\/h6>\n\n\n\n
            \n
          1. S. Wang, M. S. Al Farisi<\/strong>, J. Chen, T. Tsukamoto, S. Tanaka: \"Dual-Mass Resonator with Dynamically Balanced Structure for Roll\/Pitch Rate Integrating Gyroscope,\" In 2021 IEEE Sensors<\/em>, pp. 1\u20134 (2021)<\/a>.<\/li>\n\n\n\n
          2. M. S. Al Farisi<\/strong>, T. Tsukamoto, S. Tanaka: \"Fully CMOS-compatible wafer bonding based on press marking using thick electroplated aluminum,\" In 2021 21th Int. Conf. Solid-State Sensors Actuators and Microsystems (Transducers)<\/em>, pp. 1138\u20131141 (2021)<\/a>.<\/li>\n\n\n\n
          3. M. S. Al Farisi<\/strong>, T. Tsukamoto, S. Tanaka: \"Electrochemically Deposited Aluminum for MEMS Thermal Actuator,\" In 2021 Smart Systems Integration (SSI)<\/em>, pp. 90\u201393 (2021)<\/a>.<\/li>\n<\/ol>\n\n\n\n
            \u301c2020<\/h6>\n\n\n\n
              \n
            1. M. S. Al Farisi<\/strong>, T. Tsukamoto, S. Tanaka: \"Influence of Additive Inclusion on Hardness of Electroplated Al Film with Nanometer-Level Flatness from Chloroaluminate Ionic Liquid,\" In Pacific Rim Meeting on Electrochemical & Solid State Science (PRiME) 2020 Meet. Abstr.<\/em> MA2020-02<\/strong>, p. 1792 (2020)<\/a>.<\/li>\n\n\n\n
            2. S. Wang, M. S. Al Farisi<\/strong>, T. Tsukamoto, S. Tanaka: \"Roll\/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator,\" In 2020 IEEE Int. Symp. Inertial Sensors and Systems (INERTIAL)<\/em>, pp. 1\u20134 (2020)<\/a>.<\/li>\n\n\n\n
            3. M. S. Al Farisi<\/strong>, H. Hirano, S. Tanaka: \"Sealed cavity pressure evaluation from 1 Pa to over 10 kPa using thin diaphragm for MEMS vacuum packaging,\" In 2019 IEEE 32nd Int. Conf. Micro Electro Mechanical Syst. (MEMS)<\/em>, pp. 1045\u20131048 (2019)<\/a>.<\/li>\n\n\n\n
            4. M. S. Al Farisi<\/strong>, S. Hertel, M. Wiemer, T. Otto: \u201cInvestigation of aluminum patterned electrodeposition process from AlCl3-[EMIm]Cl ionic liquid for microsystems application,\" In 2018 Int. Conf. Electron. Packaging iMAPS All Asia Conf. (ICEP-IAAC)<\/em>, pp. 415\u2013418 (2018)<\/a>.<\/li>\n\n\n\n
            5. M. S. Al Farisi<\/strong>, K. Tanaka, H. Hirano, S. Tanaka: \"250\u00b0C wafer-level vacuum sealing using electroplated copper bonding frame planarized by fly-cutting,\" In 2017 19th Int. Conf. Solid-State Sensors Actuators and Microsystems (TRANSDUCERS)<\/em>, pp. 1191\u20131194 (2017)<\/a>.<\/li>\n\n\n\n
            6. M. S. Al Farisi<\/strong>, H. Hirano, S. Tanaka, H. Miura: \"Grain refining of metal surface by mechanical cutting for low-temperature wafer-level vacuum bonding,\" In 2nd USTB-TU Joint Workshop on Advanced Materials and Manufacture<\/em>, Abstracts 2 p. 6 (2017).<\/li>\n\n\n\n
            7. M. S. Al Farisi<\/strong>, H. Hirano, S. Tanaka: \"Wafer-level vacuum packaging for hetero-integration by thermo-compression bonding using planarized-electroplated gold bumps,\" In 2016 11th IEEE Int. Conf. Nano\/Micro Engineered and Molecular Systems (NEMS)<\/em>, pp. 573\u2013577 (2016)<\/a>.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

              2025 2024 2023 2022 2021 \u301c2020<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"sns_share_botton_hide":"","vkExUnit_sns_title":"","_vk_print_noindex":"","sitemap_hide":"","vkExUnit_sitemap":"","_veu_custom_css":"","veu_display_promotion_alert":"common","_exclude_from_list_pages":"","vkexunit_cta_each_option":"","vkExUnit_childPageIndex":"","vkExUnit_pageList_ancestor":"","vkExUnit_contact_enable":"","_lightning_design_setting":{"layout":"col-one"},"footnotes":""},"class_list":["post-1415","page","type-page","status-publish","hentry"],"veu_head_title_object":{"title":"","add_site_title":""},"_links":{"self":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages\/1415","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/comments?post=1415"}],"version-history":[{"count":9,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages\/1415\/revisions"}],"predecessor-version":[{"id":1561,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages\/1415\/revisions\/1561"}],"wp:attachment":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/media?parent=1415"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}