Flexible MEMS thermal physical sensor<\/h3>\n\n\n\n
\u30d5\u30ec\u30ad\u30b7\u30d6\u30ebMEMS\u71b1\u5f0f\u7269\u7406\u91cf\u30bb\u30f3\u30b5<\/span><\/strong><\/p>\n\n\n\n Conventional MEMS are primarily fabricated from silicon (Si) and have been widely used as highly accurate and reliable sensors across various fields. However, because Si is a rigid material, its mechanical properties differ significantly from those of soft biological tissues, which can lead to discomfort, inflammation, or even tissue damage in biomedical applications. To address this issue, we are developing flexible MEMS thermal sensors that are mechanically compliant and better suited for integration with biological systems. These sensors operate based on thermal principles to detect flow and motion. We are also implementing the developed sensors to measure important physical parameters such as fluid flow velocity, acceleration, and wall shear stress.<\/p>\n\n\n\n \u5f93\u6765\u306eMEMS\u306f\u4e3b\u306b\u30b1\u30a4\u7d20\u30fb\u30b7\u30ea\u30b3\u30f3\uff08Si\uff09\u3067\u4f5c\u88fd\u3055\u308c\u3001\u9ad8\u7cbe\u5ea6\u304b\u3064\u9ad8\u4fe1\u983c\u6027\u306a\u30bb\u30f3\u30b5\u3068\u3057\u3066\u5e45\u5e83\u3044\u5206\u91ce\u3067\u5229\u7528\u3055\u308c\u3066\u304d\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u3001Si\u306f\u786c\u3044\u6750\u6599\u3067\u3042\u308b\u305f\u3081\u3001\u3084\u308f\u3089\u304b\u3044\u751f\u4f53\u7d44\u7e54\u3068\u306f\u6a5f\u68b0\u7684\u7279\u6027\u304c\u5927\u304d\u304f\u7570\u306a\u308a\u3001\u533b\u7642\u5fdc\u7528\u3067\u306f\u9055\u548c\u611f\u3084\u708e\u75c7\u3001\u7d44\u7e54\u640d\u50b7\u306e\u539f\u56e0\u3068\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u3053\u3067\u672c\u7814\u7a76\u5ba4\u3067\u306f\u3001\u751f\u4f53\u306b\u9069\u5408\u3059\u308b\u67d4\u8edf\u6027\u3092\u6301\u3064\u30d5\u30ec\u30ad\u30b7\u30d6\u30ebMEMS\u71b1\u5f0f\u30bb\u30f3\u30b5\u306e\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u307e\u3059\u3002\u672c\u30bb\u30f3\u30b5\u306f\u3001\u6e29\u5ea6\u5909\u5316\u3092\u5229\u7528\u3057\u3066\u6d41\u308c\u3084\u52d5\u304d\u3092\u691c\u51fa\u3059\u308b\u3082\u306e\u3067\u3001\u6d41\u4f53\u306e\u6d41\u901f\u3001\u52a0\u901f\u5ea6\u3001\u58c1\u9762\u305b\u3093\u65ad\u5fdc\u529b\u3068\u3044\u3063\u305f\u7269\u7406\u91cf\u306e\u8a08\u6e2c\u306b\u3082\u5c55\u958b\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<\/div><\/div>\n\n\n\n \u975e\u4f1d\u7d71\u7684\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u306eMEMS\u5fdc\u7528<\/span><\/strong><\/p>\n\n\n\n MEMS have traditionally been built on silicon (Si) platforms using well-established microfabrication processes. In this research, we explore non-traditional materials and fabrication processes to expand the design space of MEMS devices. One approach is the use of electroplating of metals such as gold (Au), copper (Cu), and aluminum (Al), which enables thick, high-quality films for heterogeneous device packaging and efficient thermal actuators. In parallel, we investigate laser-induced graphene (LIG), a maskless and scalable technique that converts polymer surfaces into conductive graphene structures, suitable for flexible and sensitive sensing elements. Furthermore, we develop physical sensors based on biodegradable materials, aiming to reduce environmental impact in the emerging \u201ctrillion-sensor\u201d era by creating devices that naturally decompose after use. By integrating these unconventional materials and processes, we seek to establish a new paradigm for MEMS that combines performance, adaptability, and sustainability.<\/p>\n\n\n\n \u5f93\u6765\u306eMEMS\u306f\u3001\u30b1\u30a4\u7d20\u30fb\u30b7\u30ea\u30b3\u30f3\uff08Si\uff09\u3092\u57fa\u76e4\u3068\u3057\u305f\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u306b\u3088\u3063\u3066\u767a\u5c55\u3057\u3066\u304d\u307e\u3057\u305f\u3002\u305d\u306e\u5f93\u6765\u6280\u8853\u3092\u62e1\u5f35\u3059\u308b\u305f\u3081\u306b\u672c\u7814\u7a76\u5ba4\u3067\u306f\u3001\u975e\u4f1d\u7d71\u7684\u6750\u6599\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u3092\u6d3b\u7528\u3057\u305f\u65b0\u3057\u3044MEMS\u6280\u8853\u306e\u5275\u51fa\u3092\u76ee\u6307\u3057\u307e\u3059\u3002\u5177\u4f53\u7684\u306b\u306f\u3001\u91d1\uff08Au\uff09\u3001\u9285\uff08Cu\uff09\u3001\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08Al\uff09\u306e\u96fb\u89e3\u3081\u3063\u304d\u3092\u7528\u3044\u305f\u539a\u819c\u5f62\u6210\u306b\u3088\u308a\u3001\u7570\u7a2e\u6750\u6599\u306e\u9ad8\u7cbe\u5ea6\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3084\u9ad8\u52b9\u7387\u306a\u71b1\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u30dd\u30ea\u30de\u30fc\u8868\u9762\u3092\u30ec\u30fc\u30b6\u7167\u5c04\u306b\u3088\u308a\u76f4\u63a5\u30b0\u30e9\u30d5\u30a7\u30f3\u5316\u3059\u308b\u30ec\u30fc\u30b6\u8a98\u8d77\u30b0\u30e9\u30d5\u30a7\u30f3\uff08LIG\uff09\u6280\u8853\u3092\u7528\u3044\u3001\u30de\u30b9\u30af\u30ec\u30b9\u304b\u3064\u67d4\u8edf\u57fa\u677f\u4e0a\u3067\u306e\u9ad8\u611f\u5ea6\u30bb\u30f3\u30b5\u69cb\u7bc9\u3092\u53ef\u80fd\u306b\u3057\u3066\u3044\u307e\u3059\u3002\u3055\u3089\u306b\u3001\u30c8\u30ea\u30ea\u30aa\u30f3\u30bb\u30f3\u30b5\u6642\u4ee3\u306b\u304a\u3051\u308b\u74b0\u5883\u8ca0\u8377\u4f4e\u6e1b\u3092\u898b\u636e\u3048\u3001\u751f\u5206\u89e3\u6027\u6750\u6599\u3092\u7528\u3044\u305f\u7269\u7406\u30bb\u30f3\u30b5\u306e\u958b\u767a\u306b\u3082\u53d6\u308a\u7d44\u3093\u3067\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u975e\u4f1d\u7d71\u7684\u6280\u8853\u3092\u878d\u5408\u3059\u308b\u3053\u3068\u3067\u3001\u9ad8\u6a5f\u80fd\u6027\u3068\u9069\u5fdc\u6027\u3001\u6301\u7d9a\u53ef\u80fd\u6027\u3092\u517c\u306d\u5099\u3048\u305f\u6b21\u4e16\u4ee3MEMS\u306e\u65b0\u305f\u306a\u8a2d\u8a08\u6307\u91dd\u3092\u69cb\u7bc9\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<\/div><\/div>\n\n\n\n \u96c6\u7a4d\u5316MEMS\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u5b9f\u88c5<\/span><\/strong>\u306b\u3088\u308b\u30de\u30a4\u30af\u30ed\u30e1\u30ab\u30c8\u30ed\u30cb\u30af\u30b9<\/span><\/strong><\/p>\n\n\n\n Micro-mechatronics combines microsensors, embedded electronics, and data processing to create compact sensing systems. Here we develop accessible biomedical measurement platforms by integrating commercially available MEMS sensors with low-cost microcontrollers such as Raspberry Pi and hybridizing it with conventional medical tools. These MEMS devices can capture medically relevant signals, enabling real-time data acquisition and processing without expensive clinical equipment. By emphasizing rapid prototyping and system integration, this approach supports the development of portable and wearable health-monitoring systems, contributing to affordable and continuous healthcare solutions.<\/p>\n\n\n\n \u30de\u30a4\u30af\u30ed\u30e1\u30ab\u30c8\u30ed\u30cb\u30af\u30b9\u306f\u3001\u30de\u30a4\u30af\u30ed\u30bb\u30f3\u30b5\u3001\u7d44\u8fbc\u307f\u96fb\u5b50\u56de\u8def\u3001\u30c7\u30fc\u30bf\u51e6\u7406\u3092\u7d71\u5408\u3057\u305f\u5c0f\u578b\u30b7\u30b9\u30c6\u30e0\u3092\u69cb\u7bc9\u3059\u308b\u6280\u8853\u3068\u3057\u3066\u77e5\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u672c\u7814\u7a76\u5ba4\u3067\u306f\u3001\u5e02\u8ca9\u306eMEMS\u30bb\u30f3\u30b5\u3068\u4f4e\u30b3\u30b9\u30c8\u30de\u30a4\u30b3\u30f3\u3067\u3042\u308bRaspberry Pi\u3092\u7d44\u307f\u5408\u308f\u305b\u3001\u65e2\u5b58\u306e\u533b\u7642\u5668\u5177\u306b\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u5b9f\u88c5\u3057\u3066\u624b\u8efd\u306b\u5229\u7528\u53ef\u80fd\u306a\u751f\u4f53\u4fe1\u53f7\u8a08\u6e2c\u30b7\u30b9\u30c6\u30e0\u3092\u958b\u767a\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u751f\u4f53\u533b\u7642\u30fb\u798f\u7949\u306b\u95a2\u9023\u3059\u308b\u4fe1\u53f7\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u53d6\u5f97\u30fb\u89e3\u6790\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3068\u3057\u307e\u3059\u3002\u8fc5\u901f\u306a\u8a66\u4f5c\u3068\u30b7\u30b9\u30c6\u30e0\u7d71\u5408\u3092\u91cd\u8996\u3059\u308b\u3053\u3068\u3067\u3001\u5728\u5b85\u533b\u7642\u3084\u30a6\u30a7\u30a2\u30e9\u30d6\u30eb\u6a5f\u5668\u3078\u306e\u5fdc\u7528\u3092\u898b\u636e\u3048\u305f\u3001\u4f4e\u30b3\u30b9\u30c8\u3067\u6301\u7d9a\u7684\u306a\u5065\u5eb7\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u6280\u8853\u306e\u5b9f\u73fe\u3092\u76ee\u6307\u3057\u307e\u3059\u3002<\/p>\n<\/div><\/div>\n","protected":false},"excerpt":{"rendered":" We are studying MEMS (micro-electro mechanical systems), from materials to device and systems, particularly for biomedical and welfare applications. Students \/ researchers with various background, including (but not limited to) mechanical engineering, materials sciences \/ engineering, electrical engineering, information sciences, physics, chemistry are welcome. Below are some examples of our research topics. \u5f53\u7814\u7a76\u5ba4\u3067\u306f\u3001\u6750\u6599\u304b\u3089\u30c7\u30d0\u30a4\u30b9\u3001\u3055\u3089\u306b\u306f\u30b7\u30b9\u30c6\u30e0\u306b\u81f3\u308b\u307e\u3067\u3001MEMS\uff08\u5fae\u5c0f\u96fb\u6c17\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0\uff09\u306b\u95a2\u3059\u308b\u7814\u7a76\u3092\u884c\u3063\u3066\u304a\u308a\u3001\u7279\u306b\u751f\u4f53\u533b\u7642\u30fb\u798f\u7949\u3078\u306e\u5fdc\u7528\u306b\u6ce8\u529b\u3057\u3066\u3044\u307e\u3059\u3002\u6a5f\u68b0\u5de5\u5b66\u3001\u6750\u6599\u79d1\u5b66\u30fb\u5de5\u5b66\u3001\u96fb\u6c17\u96fb\u5b50\u5de5\u5b66\u3001\u60c5\u5831\u79d1\u5b66\u3001\u7269\u7406\u5b66\u3001\u5316\u5b66\u306a\u3069\u3092\u306f\u3058\u3081\u3001\u5206\u91ce\u3092\u554f\u308f\u305a\u591a\u69d8\u306a\u30d0\u30c3\u30af\u30b0\u30e9\u30a6\u30f3\u30c9\u3092\u6301\u3064\u5b66\u751f\u30fb\u7814\u7a76\u8005\u3092\u6b53\u8fce\u3057\u307e\u3059\u3002\u4e0b\u8a18\u306b\u3044\u304f\u3064\u304b\u306e\u30c6\u30fc\u30de\u3092\u7d39\u4ecb\u3057\u307e\u3059\u3002 \u4e3b\u306a\u5171\u540c\u7814\u7a76\u5148\uff1a\u5e83\u5cf6\u5e02\u7acb\u5927\u5b66 \u5f0f\u7530\u5149\u5b8f\u6559\u6388\uff0c\u9577\u8c37\u5ddd\u7fa9\u5927\u51c6\u6559\u6388\uff0c\u540d\u53e4\u5c4b\u5927\u5b66 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"sns_share_botton_hide":"","vkExUnit_sns_title":"","_vk_print_noindex":"","sitemap_hide":"","vkExUnit_sitemap":"","_veu_custom_css":"","veu_display_promotion_alert":"","_exclude_from_list_pages":"","vkexunit_cta_each_option":"","vkExUnit_childPageIndex":"","vkExUnit_pageList_ancestor":"","vkExUnit_contact_enable":"","_lightning_design_setting":{"layout":"col-one-no-subsection"},"footnotes":""},"class_list":["post-1502","page","type-page","status-publish","hentry"],"veu_head_title_object":{"title":"","add_site_title":""},"_links":{"self":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages\/1502","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/comments?post=1502"}],"version-history":[{"count":28,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages\/1502\/revisions"}],"predecessor-version":[{"id":1547,"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/pages\/1502\/revisions\/1547"}],"wp:attachment":[{"href":"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-json\/wp\/v2\/media?parent=1502"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}![\"\"](\"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-content\/uploads\/2026\/04\/research-flex-2026.png\")
<\/figure>Non-traditional materials and processes for MEMS<\/h3>\n\n\n\n
![\"\"](\"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-content\/uploads\/2026\/04\/research-mater-2026-1024x717.png\")
<\/figure>Micro-mechatronics using hybrid integrated MEMS<\/h3>\n\n\n\n
![\"\"](\"https:\/\/www.life.kyutech.ac.jp\/~mems\/wp-content\/uploads\/2026\/04\/research-mechatro-2026-833x1024.png\")
<\/figure>