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Fundamentals of MEMS

Summary

Using microfabrication techniques focusing on semiconductor processing will enable the creation of minute structures from the size of submicrons to a few mm. Students will acquire the basic skills required for the creation through lectures and training exercises.

Course Contents

1. Lectures

・Basic semiconductor
processing technology

・Basic microfabrication
・Examples of MEMS fabrication

2. Practical Training

・Thin film formation experiments using the sputtering and vacuum deposition methods
・Micropattern drawing and image development experiments using an ultraviolet light exposure equipment
・Dry etching experiments using a plasma etching equipment
・Wet etching experiments with acid and alkali solutions
・Soft lithography experiments using silicone resin molding

Structure and Schedule

Lectures will be given using books and reference material specified in the package. Progress will be presented in seminar style followed by written submission as a report. Experiments will be carried out according to the procedure specified in the package. Reports will be submitted once per week and meetings will be called as needed.

Course Option

Exercise subjects related to the theme will be decided upon through private consultation with each student

Course Objectives

While it is important to acquire knowledge on microfabrication principles and procedures, the major focus will be on acquiring the thinking and sensibility required for creating fine structures.

Fundamental skills required for the course

There is no particular basic knowledge required to take this course; however, it is desirable for students to have taken the “Bio-interfaces” course that is offered during the first semester in the first year of the doctorate program.

Examples of Research Theme Combination

The following list shows examples of research projects that can be combined with this course.
"Fluid technology and MEMS"
"Biosensor and MEMS"
"Cell technology and MEMS"

Assessment of academic achievement

Scores will be given on a scale of 1 to 5 for the items listed below. An average score of 3.5 is considered a passing score.

(1) Level of understanding of semiconductor processing and microfabrication
(2) Level of achievement in fabrication experiments
(3) Final presentation and report